Skip to content Skip to navigation

Electron-beam lithography

direct write patterning process that uses a focused, concentrated stream of electrons to modify the solubility of a resist layer [SOURCE: ISO/TS 80004-8 v1, 7.1.7]

SEMTech Solutions
SEMTech Solutions
6 Executive Park Drive North Billerica, MA 01862 USA

SEMTech Solutions is a leading supplier of refurbished SEMs and analytical FE-SEM services. In addition, we are also a North American sales and service representation company handling new scientific instrumentation that specializes in electron beam technology (Electron Beam Lithography systems, LN2-free Silicon Drift EDX detectors, 3D Roughness Analyzing SEMs, etc.). With over 200 years combined SEM experience, our sales and service engineers located throughout the U.S. are committed to our customers.

Oregon Nanoscience and Microtechnologies Institute
Oregon Nanoscience and Microtechnologies Institute
P.O. Box 2041 Corvalis, OR 97339 USA

ONAMI is Oregon’s first ‘Signature Research Center’ and a multi-level collaboration among Oregon’s research universities, Pacific Northwest National Laboratory and industry in the “Silicon Forest” high-tech cluster that is home to the world’s leading semiconductor, MEMS, nanotechnology tools and quantum dot industrial sites.

Pages