Deep reactive ion etching (DRIE)

SAMCO was founded by Osamu Tsuji in 1979 as the Semiconductor And Materials COmpany (SAMCO). From its modest beginnings in a garage in Kyoto, Japan, SAMCO has grown into a $50 million corporation with more than 150 high-level design and production research associates at its corporate headquarters in Kyoto, Japan, sales offices in Tokyo, Tokai, and satellite offices in Kanagawa, Tsukuba, and Sunnyvale, California. The Silicon Valley research and development facility in Sunnyvale was opened in 1987.

imt, Inc. is a leading MEMS contract manufacturing and foundry partner that combines cooperative design services with a unique mix of experience in prototyping, process development, high-volume manufacturing, metrology and test capabilities to serve a diverse range of customer applications