Focused ion-beam (FIB) etching
beam of ions (usually gallium) focused through a set of electrostatic lenses to create a small spot on the substrate [SOURCE: ISO/TS 80004-8 v1, 7.3.10]
beam of ions (usually gallium) focused through a set of electrostatic lenses to create a small spot on the substrate [SOURCE: ISO/TS 80004-8 v1, 7.3.10]