Sputter etching
process of etching through physical interactions (momentum transfer) between accelerated chemically inert ions (e.g. argon) and etched solid [SOURCE: ISO/TS 80004-8 v1, 7.3.17]
process of etching through physical interactions (momentum transfer) between accelerated chemically inert ions (e.g. argon) and etched solid [SOURCE: ISO/TS 80004-8 v1, 7.3.17]