Immersion optics
optical lithography (3.6) process that immerses the objective lens and resist in a liquid to provide refractive index matching [SOURCE: ISO/TS 80004-8 v1, 7.1.10]
optical lithography (3.6) process that immerses the objective lens and resist in a liquid to provide refractive index matching [SOURCE: ISO/TS 80004-8 v1, 7.1.10]
This project is supported by the National Science Foundation CMMI-1025020
Center for Hierarchical Manufacturing