A premier research laboratory in the College of Engineering, the Carnegie Mellon Nanofabrication Facility is one of the most well equipped university based facilities for thin film and nano/micro device development in the United States. The Nanofab includes a cleanroom with 2,600 square feet of class 100 space and 1,200 square feet of class 10 space, as well as three thin film labs.
Focused ion beam (FIB)
NPGS is the top selling SEM lithography system at research institutions in North America and its use has become widespread around the world. Nanometer Pattern Generation System (NPGS) for electron beam and ion beam lithography using a commercial SEM, STEM, FIB, or dual beam microscope.
The NIST Center for Nanoscale Science and Technology (CNST) is a national user facility with a focus on commerce, supporting the U.S. nanotechnology enterprise from discovery to production by providing industry, academia, and other government agencies with access to world-class nanoscale measurement and fabrication methods and technology. The CNST's shared-use NanoFab gives researchers access to and training on a state-of-the-art tool set required for cutting-edge nanotechnology development. A simple application process is designed to get work started in a few weeks.
ONAMI is Oregon’s first ‘Signature Research Center’ and a multi-level collaboration among Oregon’s research universities, Pacific Northwest National Laboratory and industry in the “Silicon Forest” high-tech cluster that is home to the world’s leading semiconductor, MEMS, nanotechnology tools and quantum dot industrial sites.