SUSS MicroTec
228 Suss Drive
Waterbury Center, VT
05677
USA
SUSS MicroTec is a leading supplier of equipment and process solutions for markets such as 3-D Integration, Advanced Packaging, MEMS, Nanotechnology and Compound Semiconductor.
Nano-imprint lithography (NIL)
process in which a pattern is transferred by pressing a nanoscale (2.7) template (usually called a die, stamp, mask or mould) of the desired pattern in relief into a deformable resist, which is then cured thermally or with light [SOURCE: ISO/TS 80004-8 v1, 7.1.18]
