plasma enhanced CVD

SAMCO was founded by Osamu Tsuji in 1979 as the Semiconductor And Materials COmpany (SAMCO). From its modest beginnings in a garage in Kyoto, Japan, SAMCO has grown into a $50 million corporation with more than 150 high-level design and production research associates at its corporate headquarters in Kyoto, Japan, sales offices in Tokyo, Tokai, and satellite offices in Kanagawa, Tsukuba, and Sunnyvale, California. The Silicon Valley research and development facility in Sunnyvale was opened in 1987.

AIXTRON's product portfolio includes equipment based on AIXTRON-Nanoinstruments "Black Magic" technology. These fully automatic systems can operate in both, thermal CVD and plasma enhanced CVD modes. This is highly important for carbon nanomaterials as it enables our equipment to produce virtually all variations and morphologies of carbon nanotubes, nanofibers and graphene.