LumArray, Inc
15 Ward Street
Somerville, MA
02143
USA
Lumarray is a lithography company with a state-of-the-art-patented technology. Our technology, Zone-Plate-Array Lithography (ZPAL), integrates recent advances in microfabrication, micromechanics and fast computing to produce a lithography tool that will handle the lithographic needs of the decades to come.